发明名称 Method for synthesizing n-type diamond having low resistance
摘要 In synthesizing a diamond by a vapor-phase growth method, a sputtering method, or a high-pressure and high-temperature synthesis method, N, P or As as an n-type dopant, and H as a p-type dopant are simultaneously doped in a crystal to form a donor-acceptor pair in the crystal, to thereby synthesize a transparent n-type diamond having low resistance.
申请公布号 US6340393(B1) 申请公布日期 2002.01.22
申请号 US20000508053 申请日期 2000.03.07
申请人 JAPAN SCIENCE AND TECHNOLOGY CORPORATION 发明人 YOSHIDA HIROSHI
分类号 B01J3/06;C23C14/06;C23C16/27;C30B23/02;C30B25/02;C30B29/04;H01L21/203;H01L21/205;(IPC1-7):C30B29/04 主分类号 B01J3/06
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