| 摘要 |
A feeding mechanism for moving a table relative to a base has a pair of pulley (301, 302, 401, 402) supported by either one of the table (21) and the base (22), a loop-shaped belt (303, 403) stretched between the pulleys and having a part thereof extending in a movement direction of the relative movement, a joint (304, 404) for connecting the other one of the table and the base with the belt, and a pinch mechanism (310, 410) provided to the either one of the table and the base to hold a part of the belt.
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