METHOD FOR FABRICATING CRYSTALLINE ALKALINE EARTH METAL OXIDE ON SILICON SUBSTRATE

摘要

PURPOSE: A method for fabricating a crystalline alkaline earth metal oxide is provided to form the crystalline alkaline earth metal oxide on a silicon substrate, by preparing the silicon substrate having silicon dioxide on its surface so that the substrate is heated at a temperature not higher than a sublimation temperature and the surface of the substrate is exposed to an alkaline earth metal beam. CONSTITUTION: Silicon dioxide(11) is formed on the silicon substrate(10) wherein the silicon dioxide has a sublimation temperature. The silicon substrate is heated at a temperature not higher than the sublimation temperature of the silicon dioxide. The substrate of the silicon substrate is exposed to the alkaline earth metal beam.