EXHAUSTING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An exhausting apparatus for manufacturing a semiconductor device is provided to prevent a disconnection of a robot signal and a corrosion problem, by installing a ventilation part in a predetermined region inside a process chamber so that gas remaining inside the chamber is easily exhausted to an exhaust duct. CONSTITUTION: The exhaust duct(102) through which unnecessary gas generated in manufacturing the semiconductor device is exhausted to the exterior of the process chamber(100) is installed in the exhausting apparatus. The ventilation part which transfers the necessary gas exhausted form a gas exhaust port to the exhaust duct is installed in the predetermined region inside the process chamber.