| 摘要 |
<p>A system, method, and computer readable medium for providing automated customer support (522) of semiconductor manufacturing equipment is disclosed. Sensors (12-1, 14-1, 16-1, 18-1) attached to the semiconductor manufacturing equipment (12, 14, 16, 18) can be monitored by either an automated program or a service technician to detect alarm conditions (610). Upon detection of an alarm condition, a remotely located customer support system (62) can be contacted and provided with key values (712) to query a database for electronic text files (510) containing instructions for a service technician to follow when taking corrective action to resolve the alarm condition. When an electronic text file (510) is found to be associated with the key value in the database, the electronic text file is transmitted to a service technician who services the manufacturing equipment at the customer site.</p> |
