| 摘要 |
PURPOSE: An apparatus for processing a disc-type body is provided to process at least one lower portion of the disc-type body, by preventing the disc-type body from being contaminated by particles from a mechanical apparatus and deposited liquid drops. CONSTITUTION: A carrier has an upper surface, capable of being rotated. At least two apparatuses vertically protrudes from the upper surface to position the disc-type body(1). At least one line(20,22,24,26) supplies a process medium to the lower portion of the disc-type body, capable of being stopped and penetrating the carrier in the center. A cover is formed to be stopped and forms a circular gap. The cover is separated from at least one region of the lower surface of the carrier, perforated by at least one line without a gap.
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