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发明名称
SUBSTRATHALTERUNG FÜR SiC-EPITAXIE UND VERFAHREN ZUM HERSTELLEN EINES EINSATZES FÜR EINEN SUSZEPTOR
摘要
申请公布号
DE59900493(D1)
申请公布日期
2002.01.17
申请号
DE19995000493
申请日期
1999.01.18
申请人
SICED ELECTRONICS DEVELOPMENT GMBH & CO. KG
发明人
RUPP, ROLAND;WIEDENHOFER, ARNO
分类号
C23C16/00;(IPC1-7):C23C16/00
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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