发明名称 |
Method of fabricating semiconductor device equipped with capacitor portion |
摘要 |
In fabricating a capacitor portion of a semiconductor device, after forming an upper electrode, a resist pattern for forming a lower electrode is formed and etching processing of an insulating film layer and a first metal layer is carried out. Thus, the lower electrode and a wiring pattern can simultaneously be formed by etching the insulating film layer and the first metal layer after forming a resist pattern one time, without a resist pattern directly formed on the first metal layer.
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申请公布号 |
US2002006700(A1) |
申请公布日期 |
2002.01.17 |
申请号 |
US20010848235 |
申请日期 |
2001.05.04 |
申请人 |
KANAMORI JUN;KATAKURA YOSHIAKI |
发明人 |
KANAMORI JUN;KATAKURA YOSHIAKI |
分类号 |
H01L21/3213;H01L21/02;H01L21/768;H01L21/822;H01L27/04;(IPC1-7):H01L47/00 |
主分类号 |
H01L21/3213 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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