| 摘要 |
A detection unit 10, which is disposed in opposite relation to a scale 12, includes a transmission coil 10a and a detection coil 10b. A metal film 10g formed of two opposing metal films is provided between a silicon substrate and the transmission coil 10a, one of the two metal films is connected to a drive circuit 10c, and the other is connected to the transmission coil 10a. The metal film 10g provides the capacitance C of an LC resonance circuit, so that a chip capacitor is made unnecessary. The metal film 10g may be formed of a magnetic material.
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