| 发明名称 |
SINGLE CRYSTAL WAFER AND SOLAR BATTERY CELL |
| 摘要 |
A single crystal wafer, wherein the principal surface of the single crystal wafer constitutes a surface or a surface equivalent to the surface having angles of inclination of alpha (0 DEG < alpha <90 DEG ) in [011] orientation with respect to the [100] axis of the single crystal, beta (0 DEG < beta <90 DEG ) in [01-1] orientation, and gamma (0 DEG </= gamma <45 DEG ) in [10-1] or [101] direction. Accordingly, single crystal material losses are reduced by providing a single crystal wafer that withstands a device process despite a thin wafer, and a MIS type semiconductor device or a solar battery cell can be offered at low costs by using such a wafer. |
| 申请公布号 |
WO0205335(A1) |
申请公布日期 |
2002.01.17 |
| 申请号 |
WO2001JP05892 |
申请日期 |
2001.07.06 |
| 申请人 |
SHIN-ETSU HANDOTAI CO.,LTD.;OHMI, TADAHIRO;SUGAWA, SHIGETOSHI;ITO, TATSUO;KANAYA, KOICHI |
发明人 |
OHMI, TADAHIRO;SUGAWA, SHIGETOSHI;ITO, TATSUO;KANAYA, KOICHI |
| 分类号 |
C30B29/06;C30B15/00;H01L21/02;H01L21/28;H01L21/316;H01L29/51;H01L31/028;H01L31/036;H01L31/04 |
主分类号 |
C30B29/06 |
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