| 摘要 |
In a first aspect, a loadlock chamber is provided that includes: (1) a first chamber portion adapted to remain stationary; (2) a second chamber portion adapted to move relative to the first chamber portion; and (3) a substrate handler located between the first and second chamber portions. The loadlock chamber is adapted to assume: (a) a closed position wherein the first and second chamber portions contact one another so as to define a region capable of maintaining a vacuum pressure; (b) an opened position wherein the second chamber portion moves away from the first chamber portion so as to define an opening; and (c) a load position wherein at least a portion of the substrate handler extends through the opening. Systems and methods in accordance with these and other aspects also are provided. |
