| 摘要 |
PURPOSE: An apparatus for estimating an electrical characteristic of a wafer is provided to estimate the electrical characteristic of the wafer at an extremely low temperature of 77K or 4K, by making a box containing the wafer soaked in a coolant storing bath having coolant like liquid nitrogen or liquid helium wherein the box is composed of a material like bronze of which the heat transfer is superior. CONSTITUTION: A wafer sample(1) to which an electrode(6) for estimating the electrical characteristic is adhered is stored in a sample box(2) in which a thermometer(7) is mounted. A heater(8) mounted in the sample box heats the temperature of the sample. An outer box(3) surrounds the sample box, connected to a portion on which the heater of the sample box is mounted. Coolant(4) is filled inside the coolant storing bath(5) so that the outer box and the sample box are soaked in the coolant.
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