| 摘要 |
PURPOSE: Electrochemical machining method and apparatus are provided to use ultra pure water as an electrolytic solution and efficiently perform machining for removal of a material such as aluminum and iron, to realize not only machining for formation of an oxide film, but also machining for removal even in the case of a material such as aluminum and silicon, and to improve accuracy of machining a workpiece. CONSTITUTION: The electrochemical machining apparatus(10) comprises a machining chamber(14) for holding ultra-pure water(12), a cathode/anode(24,30) immersed in the ultra-pure water held in the machining chamber, and a workpiece holding portion(29) for holding a workpiece(28) at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultra-pure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source(22) for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion.
|
