METHOD AND APPARATUS FOR HEATING A POLISHING BLOCK

摘要

An apparatus (11) for heating a polishing block (13) priorto wax mounting an article to be polished on the polishing block(13) comprises a heater (19) for heating the block and a chuck(15) including a surface (17) for supporting the polishing block(13). The chuck (15) is configured to hold an underside of thepolishing block (13) against the surface (17) to inhibit warpingof the block (13) and to promote uniform, rapid heating of theblock. A method of heating the polishing block (13) comprisesplacing the block on a heater (19) so that an area of a heatedsurface (14a) of the block is in contact with the heater (19) andoperating the heater to heat the block (13). The temperature ofthe block (13) is monitored and the area of the heated surface(14a) of the block (13) in contact with the heater (19) isadjusted in response to the temperature of the block (13).