摘要 |
<p>The present invention includes a latch assembly (102), such as may be useful for SMIF pods. SMIF pods are in general comprised of a pod door (110) which mates with a pod shell (100) to provide a sealed environment in which wafers may be stored and transferred. During wafer storage and transport, the pod door (110) is typically held affixed to the pod shell (100) by a latch assembly (102). When it is desired to separate the pod door (110) from the pod shell (100), each latch must be actuated outwardly, to withdraw each engagement portion (116) from the pod door (110), at which time the pod door (110) may be separated. The present invention includes an improved such latch assembly (102).</p> |