发明名称 SLURRY DELIVERY CONTROL APPARATUS AND METHOD
摘要 An apparatus and method for controlling a flow of a slurry (54) having an outer bypass loop (76) configured to carry the slurry from a source (52) and containing a first upstream valve (66) and a first downstream valve (82) connected by an outer conduit (70). A splitter valve (120) is positioned between the first upstream valve (66) and the first downstream valve (82) to receive aflow from the outer conduit. An inner bypass loop (88) is provided containing an upstream portion of the outer conduit (70) in fluid communication with a second upstream valve (96) and a second downstream valve (100).
申请公布号 WO0051168(A3) 申请公布日期 2002.01.17
申请号 WO2000US04787 申请日期 2000.02.25
申请人 THOROUGHBRED LC 发明人 VETTER, WILLIAM, L.;MARKS, ERNIE
分类号 H01L21/00;(IPC1-7):B24B57/00 主分类号 H01L21/00
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