摘要 |
PURPOSE: A film forming apparatus is provided to solve the problem regarding volatileness of a solvent in an EL(ElectroLuminescent) forming material, which occurs in adopting printing method. CONSTITUTION: An EL layer(112) is formed in a pixel portion(114a) of a light emitting device by using a printing method. Upon formation of the EL layer(112), a printing chamber is pressurized to reach a pressure equal to or higher than the atmospheric pressure, and the printing chamber is filled with inert gas or set to a solvent atmosphere. Thus, the difficulty in forming the EL layer by printing method is eliminated.
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