发明名称 FILM FORMING APPARATUS AND METHOD OF MANUFACTURING LIGHT EMITTING DEVICE
摘要 PURPOSE: A film forming apparatus is provided to solve the problem regarding volatileness of a solvent in an EL(ElectroLuminescent) forming material, which occurs in adopting printing method. CONSTITUTION: An EL layer(112) is formed in a pixel portion(114a) of a light emitting device by using a printing method. Upon formation of the EL layer(112), a printing chamber is pressurized to reach a pressure equal to or higher than the atmospheric pressure, and the printing chamber is filled with inert gas or set to a solvent atmosphere. Thus, the difficulty in forming the EL layer by printing method is eliminated.
申请公布号 KR20020005511(A) 申请公布日期 2002.01.17
申请号 KR20010041098 申请日期 2001.07.10
申请人 发明人
分类号 H01L31/12;H01L21/77;H01L27/32;H01L51/40;H01L51/56;(IPC1-7):H01L31/12 主分类号 H01L31/12
代理机构 代理人
主权项
地址