发明名称 GRATING TYPE SPATIAL LIGHT MODULATORS AND METHOD OF MANUFACTURING GRATING TYPE SPATIAL LIGHT MODULATORS
摘要 A spatial light modulator having grating bars in parallel with each other and with underlying substrate. According to one embodiment of the invention, a spatial light modulator (601) is provided that employs B number of parallel bars (403) arranged to form a grating, where B is a number greater than 1, but only has S number of support posts (411) supporting the bars, where S </= 2B-1. Another embodiment of the invention provides a method for manufacturing a grating-type spatial light modulator that requires fewer manufacturing steps that conventional manufacturing methods.
申请公布号 WO0205010(A1) 申请公布日期 2002.01.17
申请号 WO2001US21762 申请日期 2001.07.10
申请人 OPTS, INC. 发明人 HESTER, CHARLES, F.;WHITEHEAD, CHARLES, A.
分类号 G02B26/08;(IPC1-7):G02B26/00 主分类号 G02B26/08
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