发明名称 |
GRATING TYPE SPATIAL LIGHT MODULATORS AND METHOD OF MANUFACTURING GRATING TYPE SPATIAL LIGHT MODULATORS |
摘要 |
A spatial light modulator having grating bars in parallel with each other and with underlying substrate. According to one embodiment of the invention, a spatial light modulator (601) is provided that employs B number of parallel bars (403) arranged to form a grating, where B is a number greater than 1, but only has S number of support posts (411) supporting the bars, where S </= 2B-1. Another embodiment of the invention provides a method for manufacturing a grating-type spatial light modulator that requires fewer manufacturing steps that conventional manufacturing methods.
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申请公布号 |
WO0205010(A1) |
申请公布日期 |
2002.01.17 |
申请号 |
WO2001US21762 |
申请日期 |
2001.07.10 |
申请人 |
OPTS, INC. |
发明人 |
HESTER, CHARLES, F.;WHITEHEAD, CHARLES, A. |
分类号 |
G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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