发明名称 SEMICONDUCTOR NON-VOLATILE MEMORY DEVICE
摘要 A semiconductor device comprising a non-volatile memory cell, for storing at least one bit, in a semiconductor substrate (1) having, in the substrate, a source region (6), a drain region (7) and a channel region (10) between the source (6) and drain (7) regions, and having, on top of the substrate, a floating gate (9) separated from the channel region (10) by a floating gate insulating layer, a select gate (11) adjacent to the floating gate and separated from the channel region by a select gate insulating layer (8), and a control gate (5) separated from the floating gate (9) by a control gate insulating layer, the floating gate being a non-conducting charge trapping dielectric layer (9).
申请公布号 WO0205353(A1) 申请公布日期 2002.01.17
申请号 WO2001EP07452 申请日期 2001.06.29
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 WIDDERSHOVEN, FRANCISCUS, P.;SCHMITZ, JURRIAAN
分类号 H01L21/8247;H01L21/8246;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L29/792 主分类号 H01L21/8247
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