发明名称 AUTOMATIC SLIT/GATE VALVE
摘要 A slit/gate valve (11) is provided. The slit/gate valve comprises a door (23) having a sealing surface (17) adapted to seal an opening (19), a linking mechanism (15) coupled to the door, and an actuator (29) coupled to the linking mechanism, the actuator adapted to move the linking mechanism and the linking mechanism adapted to translate actuation in a first direction into movement of the door in a second direction.
申请公布号 WO0205322(A2) 申请公布日期 2002.01.17
申请号 WO2001US20919 申请日期 2001.06.30
申请人 APPLIED MATERIALS, INC.;PERLOV, ILYA;GANTVARG, EUGENE 发明人 PERLOV, ILYA;GANTVARG, EUGENE
分类号 F16K3/18;F16K51/02;H01L21/00 主分类号 F16K3/18
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