发明名称 |
APPARATUS AND METHOD FOR AUTOMATICALLY TRANSFERRING WAFERS BETWEEN WAFER HOLDERS IN A LIQUID ENVIRONMENT |
摘要 |
An apparatus for transferring wafers between wafer holders such as wafer cassettes, etching drums and the like includes a tank for containing a liquid transfer medium in which the wafers can be transferred. The apparatus includes a wafer transfer unit that can transfer a plurality of wafers such as semiconductor wafers between wafer holders, and maintain the wafers in a desired relative orientation during transfer. For example, the wafers can be maintained in a parallel relationship. The apparatus can be used to automatically transfer wafers to etching drums without cross-indexing of the wafers and without manual handling of the wafers.
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申请公布号 |
US2002006324(A1) |
申请公布日期 |
2002.01.17 |
申请号 |
US19980184652 |
申请日期 |
1998.11.03 |
申请人 |
SATO MICHITO;FUKABORI HIROAKI;MUKAINO YUKIO |
发明人 |
SATO MICHITO;FUKABORI HIROAKI;MUKAINO YUKIO |
分类号 |
B65G49/07;H01L21/00;(IPC1-7):H01L21/306 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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