发明名称 METHOD FOR MANUFACTURING QUANTUM HOLE
摘要 PURPOSE: A method for manufacturing a quantum hole is provided to control the size, depth and interval of the quantum hole, by controlling a scan area, focusing of a beam, a scan interval of time and an accelerating voltage so that quantum holes having a uniform state are repeatedly mass-produced. CONSTITUTION: A voltage is applied to ultrafine particles(29) of a uniform size and a uniform electrical characteristic to accelerate the ultrafine particles, and the ultrafine particles are integrated through a condense lens. The ultrafine particles integrated and accelerated on a substrate(30) are scanned by a scanning method so that countless ultrafine particles of a uniform state are regularly formed on the substrate.
申请公布号 KR20020005344(A) 申请公布日期 2002.01.17
申请号 KR20000039743 申请日期 2000.07.07
申请人 SANG ROK KOREA CO., LTD. 发明人 KIM, HUN
分类号 H01L29/06;(IPC1-7):H01L29/06 主分类号 H01L29/06
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