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发明名称
Vorrichtung und Verfahren zu filtern von Makropartikeln aus einem Plasmastrahl
摘要
申请公布号
DE69617645(D1)
申请公布日期
2002.01.17
申请号
DE19966017645
申请日期
1996.02.20
申请人
FILPLAS VACUUM TECHNOLOGY PTE LTD., SINGAPORE
发明人
SHI, XU;FLYNN, IAN;TAY, KANG;TAN, SIANG
分类号
C23C14/22;H01J37/32;(IPC1-7):H01J37/32
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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