CHEMICAL SUPPLY APPARATUS OF SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A chemical supply apparatus of semiconductor fabricating equipment is provided to detect air bubbles generated from an end portion of a nozzle or chemicals solidified on the end portion of the nozzle by using a sensor. CONSTITUTION: A stage(60) is used for loading a substrate(W). A nozzle(56) is used for supplying chemicals to the substrate(W). A pump(52) is used for pumping the chemicals. A chemical supply line(54) is used for connecting the pump(52) with the nozzle(56). The first identification portion(62) is used for detecting air bubbles generated from the chemicals. The first identification portion(62) is formed with the first sensor(62a) and the first alarm portion(62b). A generator(58) is connected with the nozzle(56) in order to absorb the chemicals from an end portion of the nozzle(56). The second identification portion(64) is used for detecting the remaining chemicals of the end portion of the nozzle(56). The second identification portion(64) is formed with the second sensor(64a) and the second alarm portion(64b).