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发明名称
Method for local oxidation in vertical semiconductor devices using fillets
摘要
申请公布号
GB0128414(D0)
申请公布日期
2002.01.16
申请号
GB20010028414
申请日期
2001.11.28
申请人
UNIVERSITY OF SOUTHAMPTON
发明人
分类号
主分类号
代理机构
代理人
主权项
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