DEPOSITION FILM, METHOD OF MEASURING SHAPE OF DEPOSITION FILM, METHOD OF CONTROLLING MANUFACTURING PROCESSES, MANUFACTURING METHOD, SHAPE MEASURING APPARATUS AND APPARATUS FOR CONTROLLING MANUFACTURING PROCESSES

摘要

The invention provides a method of and an apparatus for measuring and controlling the position of an edge of a deposition film, positions and widths of deposition portions and margin portions, and positions of heavy edges without the need of a skilled operator. According to the invention, the deposition portions and the margin portions are formed in a stripe shape lengthwise and alternately widthwise by a margin forming apparatus and a metal deposition apparatus, and the resulting deposition film is irradiated with light from a light source while being run by a film transportation system. A line sensor camera detects a distribution of light transmittivity on the film in the widthwise direction of the film, and on the basis of the detected distribution of light transmittivity the position of an edge of the deposition film, positions and widths of the deposition portions and the margin portions, and positions of heavy edges are measured, and the margin forming apparatus and the metallic deposition apparatus are controlled on the basis of the resulting measurements.