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经营范围
发明名称
A method of chemically mechanically polishing an electronic component
摘要
申请公布号
EP0774777(B1)
申请公布日期
2002.01.16
申请号
EP19960307693
申请日期
1996.10.24
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
ARMACOST, MICHAEL DAVID;DOBUZINSKY, DAVID MARK;GAMBINO, JEFFERY PETER;JASO, MARK ANTHONY
分类号
H01L21/304;H01L21/768;H01L21/321;(IPC1-7):H01L21/310
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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