APPARATUS OF ASSEMBLING BRUSH FOR CLEANING WAFER

摘要

PURPOSE: An apparatus of assembling a brush for cleaning a wafer is provided to insert easily a support portion into a brush in a process for assembling the brush for cleaning a wafer by using a predetermined push bar. CONSTITUTION: A tube(34) has an inlet and an outlet for passing a support portion(32). The support portion(32) is used for supporting a brush(30). A bar(34b) is inserted into the brush(30) in order to insert easily the support portion(32). The first insertion body(34) is installed at an upper edge portion of the tube(34a). A diameter of the tube(34a) is similar to the diameter of the support portion(32). A length of the bar(34b) is similar to the length of the brush(30). A resin is coated on a surface of the bar(34b). A push bar(38) is used for pushing an end portion of the support portion(32). The push bar(38) is formed with a resin material.