| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device capable of shortening the time required for switching work for the kind of flat panel displays and reducing costs. SOLUTION: A substrate supporting part 10 is provided with a support part body 11, and the end part 11a to be fitted to the end part 21b provided on the inner periphery of the support part body 21 of an extension supporting part 20 is provided as a connecting part for connecting the extension support part 20 on the outer periphery. In a case where a small-sized glass substrate 41 is conveyed, the glass substrate 41 is supported only by the substrate supporting part 10. In the case where a large-sized glass substrate 41' is conveyed, the glass substrate 41' is supported in a state where the extension support part 20 is provided on the substrate supporting part 10. |
