发明名称 |
METHOD AND DEVICE FOR TAKING WORK OUT OF DOUBLE POLISHING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To easily take out a machined work. SOLUTION: One work holding hole 16 is formed in an eccentric state in a carrier 14 engaged with a sun gear 10 and an internal gear 12 and a center Z of the carrier 14 is positioned in the work holding hole 16. The carrier 14 is positioned in a given position in a revolving direction and a suction head 23 of a pick-up member 22 of an unloading part 21 is positioned in the central part Z of the carrier 14. The work 25 in the work holding hole 16 is sucked at the suction head 23 and the work 25 is picked up by operating a pick-up member 22. Positioning of the carrier 14, positioning of the pick-up member 22, and separation of the work 25 from a lower platen are simplified and pick-up of the work 25 is easy to make. |
申请公布号 |
JP2002011654(A) |
申请公布日期 |
2002.01.15 |
申请号 |
JP20000193109 |
申请日期 |
2000.06.27 |
申请人 |
SPEEDFAM CO LTD |
发明人 |
HAKOMORI SHUNJI;MIZUNO NORIAKI |
分类号 |
B24B37/08;B24B37/27;B24B37/28;H01L21/304 |
主分类号 |
B24B37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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