CERAMIC MEMBER AND ITS MANUFACTURING METHOD, AND TABLE FOR WAFER POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a ceramic member excellent in thermal conductivity and hardly effecting breakage and excellent in long term reliability. SOLUTION: The ceramic member 2 is formed of base materials 11A and 11B made of a plurality of ceramic.metallic composite substance 18 constituted that the permeable voids of a porous substance 17 formed of silicon-contained ceramic are impregnated with metallic silicon 24. The base materials 11A and 11B are joined together through a joining layer 14 formed of the metallic silicon 24.