METHOD FOR RECYCLING PERFLUORO COMPOUND

摘要

PROBLEM TO BE SOLVED: To provide a method for recycling a PFC which can separably recover useful components in a PFC mixture and use them again in a semiconductor manufacturing process, and which is free from a problem of releasing compounds associated in global warming to atmosphere and a need of disposal of reagents used for the reaction. SOLUTION: A PFC mixture recovered from process exhaust gas of a semiconductor manufacturing process is, in a state of a mixture with an inert gas, (1) allowed to contact active carbon under a temperature condition of >=500 deg.C or (2) allowed to contact an alkaline earth metal compound under a temperature condititon of >=100 deg.C, and subsequently tetrafluoromethane and hexafluoroethane are separably recovered by rectification from the reaction mixture of the contact reaction (1) or (2). They can be recycled as PFC for the semiconductor manufacturing process.