METHOD OF MAKING SUBSTRATE FOR INK JET RECORDING HEAD, AND INK JET RECORDING HEAD HAVING THE SUBSTRATE MADE THEREBY

摘要

PROBLEM TO BE SOLVED: To improve a step coverage of a protection layer and to readily make the protection layer in a thin film. SOLUTION: A substrate for an ink jet recording head is so constituted that a heating section 8 consisting of a heating resistor layer 3 and a pair of electrodes 4 for applying an ejection energy to ink and the protection layer 5 for covering the heating section 8 are provided to a substrate 1. A method of making the substrate comprises a process for laminating an upper layer 5 as the protection layer 5 on the heating section 8, a process for forming a glass coating layer 9 on the upper layer 5 and a process for forming the protection layer 5 by etching the upper layer 5 and the glass coating layer 9.