DEVICE FOR SUPPLYING DEAERATED AND VISCOSITY-ADJUSTED COATING SOLUTION

摘要

PROBLEM TO BE SOLVED: To provide a techique capable of preventing not only the generation of coating film defects by deaerating air bubbles but also the fluctuation of the thickness of the coating film by suppressing the change of viscosity caused by deaeration. SOLUTION: The device 1 for supplying a coating solution is provided with a defoaming means 4 for deaerating the air bubbles contained in the coating solution stored in a storage device 2 and supplying the deaerated coating solution to a coating device 3, a means 5 connected to the deaerating means 4 and for liquefying a solvent vaporized from the coating solution, and a means 8 for returning the solvent liquefied in the liquefying means 5 to the deaerated coating solution. The coating solution not only deaerated but having its viscosity adjusted is supplied in the device.