发明名称 |
Wheel and conveyor system for transporting semiconductor wafers and method for transferring wafers from a conveyor system to a wafer processing station |
摘要 |
A wheel for a conveyor system for transporting semiconductor wafers includes a first section for supporting a semiconductor wafer at a first level and a second section for supporting the wafer at a second level, with the first level being higher than the second level. In one embodiment, each of the first and second sections is semicircular. The first level may be substantially the same as a level at which the wafer is subjected to a wafer cleaning operation, and the distance the second level is below the first level may be in a range from about one sixteenth of an inch to about three sixteenths of an inch. A conveyor system for transporting wafers and a method for transferring wafers from a conveyor system to a wafer processing station also are described. |
申请公布号 |
AU7365801(A) |
申请公布日期 |
2002.01.14 |
申请号 |
AU20010073658 |
申请日期 |
2001.06.29 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
BRIAN M. BLIVEN;MICHAEL RAVKIN |
分类号 |
B65G49/07;H01L21/00;H01L21/677 |
主分类号 |
B65G49/07 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|