Buckle resistant thermal bend actuators

摘要

The invention relates to a thermal bend actuator 7 including:a first anchor portion 9 for securing to a fixed substrate 2;a first thermally conductive active beam member 10 secured at a proximal end to said first anchor portion 9 and extending to a movable distal end;a second beam member 12 similarly anchored at a proximal end to said first anchor portion 9 so as to extend parallel to said first active beam member 10, each of said first and second beam members being directly or indirectly interconnected at their respective proximal ends remote said first anchor portion 9;wherein said first thermally conductive active beam member 10 is configured to define a labyrinthine conductive pathway 14 having a combined effective length in a direction extending between said fixed proximal end and said movable distal end that exceeds twice the effective direct linear path therebetween.