发明名称 |
Carrier head with reduced moment wear ring |
摘要 |
A work piece carrier head for a CMP or other polishing apparatus is configured to eliminate the slow band associated with the polishing of the surface of a work piece. The carrier head includes a wear ring that is positioned circumferentially about the work piece and that together with the work piece is pressed against a moving polishing pad. The wear ring is resiliently coupled to the body of the carrier head in a manner to avoid any overturning moment on the ring caused by the frictional force of the polishing pad against the wear ring. |
申请公布号 |
AU6874001(A) |
申请公布日期 |
2002.01.14 |
申请号 |
AU20010068740 |
申请日期 |
2001.06.27 |
申请人 |
SPEED-FAM-IPEC CORPORATION |
发明人 |
STEPHEN C. SCHULTZ;JOHN D. HERB;TIMOTHY S. DYER |
分类号 |
B24B37/30;B24B37/32 |
主分类号 |
B24B37/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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