| 摘要 |
PURPOSE: A gas sensor using a carbon nanotube is provided to obtain high response speed by detecting a micro-amount of noxious gas through application of a carbon nanotube to a gas sensor. CONSTITUTION: A gas sensor using a carbon nanotube has inter digit type structure for increasing the reaction between noxious gas and a carbon nanotube. In the gas sensor, plural fist metal electrodes(141) are formed lengthwise, and a first connecting line(142) is formed widthwise. The first connecting line is coupled with a first electrode pad(143) for electrode connection. Plural second metal electrodes(151) are formed parallel with the first metal electrodes with keeping a distance therefrom. The second metal electrodes are coupled to a second connecting line(152). The second connecting line is coupled with a second electrode pad(153). Plural carbon nanotubes(130) are formed between the first and second metal electrodes. Lift-off method is used for forming the first and second metal electrodes. Thereby, the connecting characteristics between the carbon nanotubes and the metal electrodes are enhanced.
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