RADIATION SOURCE, LITHOGRAPHIC APPARATUS, MANUFACTURING METHOD OF DEVICE, AND DEVICE MANUFACTURED BY THE SAME

摘要

PURPOSE: A radiation source is provided to have an effective self-initiation that allows making use of the dynamical pinch effect to create a high-temperature, high-density plasma for an enhanced conversion efficiency of electrical energy into radiation. CONSTITUTION: A radiation source includes an anode and a cathode for creating a discharge in a vapor in a space between anode and cathode and to form a plasma of a working vapor to generate electromagnetic radiation. The cathode defines a hollow cavity in communication with the discharge region through an aperture that has a substantially annular configuration around a central axis of the radiation source to initiate the discharge. A driver vapor is supplied to the cathode cavity and the working vapor is supplied in a region around the central axis in between anode and cathode.