| 摘要 |
PURPOSE: A method for cleaning an ELD using a laser is provided to simplify a cleaning equipment, reduce a cleaning cost, and shorten a cleaning process by performing the cleaning process by using a laser and a nitrogen gas. CONSTITUTION: To clean the ELD, the ELD is automatically transferred to a cleaning space. Pollutants adsorbed on the ELD are separated by emitting a laser to the transferred ELD. An inert gas is sprayed on the separated pollutants in order to discharge the pollutants. A KrF Excimer laser is used as the laser. An ArF Excimer laser may be also used as the laser.
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