| 摘要 |
PURPOSE: An LCD cleaning method using laser is provided, which performs cleaning process without using D.I water and chemicals, to reduce cost and to prevent environmental contamination. CONSTITUTION: An LCD is automatically transferred to a cleaning space. Laser is irradiated on the transferred LCD to separate contaminants adhered to the LCD. An inert gas is sprayed to the contaminants to discharge the contaminant to the outside. KrF Excimer laser or ArF Excimer laser is used for cleaning.
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