发明名称 LAMP POSITION MEASURING DEVICE
摘要 PROBLEM TO BE SOLVED: To stabilize measurement of a lamp position measurement device using photodetectors even when the lamp is flashing, and to enable measuring despite of the difference of lighting method of the lamp. SOLUTION: The lamp position measuring device 1 measures the position of a lamp of an exposure device depending on a detection data about irradiation light from an exposure device, which is acquired by the photodetectors 11a, 12a arranged at a prescribed position, and comprises data selecting mans 23, 24, 25, that extract the detection data which conform to the prescribed conditions, out of the data of irradiated light received at the photodetectors 11a, 12a, and measure the position of the lamp depending only on the extracted data.
申请公布号 JP2002008540(A) 申请公布日期 2002.01.11
申请号 JP20000185751 申请日期 2000.06.21
申请人 SONY CORP 发明人 TOYODA TADASHI;TAKAHATA TADASHI
分类号 H01J9/42;H01J9/227;(IPC1-7):H01J9/42 主分类号 H01J9/42
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