| 发明名称 |
METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily manufacture an electrostatic chuck. SOLUTION: An electrode pattern 2 is formed on the surface of a substrate 1 and then spraying is performed to the electrode pattern 2. As a result, a spraying film 3 is formed on the convexoconcave of the electrode pattern 2 and recesses become a helium gas passage 4.</p> |
| 申请公布号 |
JP2002009138(A) |
申请公布日期 |
2002.01.11 |
| 申请号 |
JP20000186840 |
申请日期 |
2000.06.21 |
| 申请人 |
MITSUBISHI HEAVY IND LTD |
发明人 |
SAKAMOTO HITOSHI;YOSHIDA KAZUTO |
| 分类号 |
B23Q3/15;C23C16/458;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 |
主分类号 |
B23Q3/15 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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