METHOD AND EQUIPMENT OF MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and equipment of manufacturing a semiconductor device, which can both objectively and automatically determine the requirements for converting an amorphous silicon film into a polycrystallione silicon film through laser irradiation. SOLUTION: In this manufacturing method, laser is irradiated on each lot under common laser irradiation conditions. The method comprises a process of forming a trial laser irradiated region under trial conditions and a process of determining the laser irradiation conditions for the lot, based on the optical information about the light reflected from the trial laser irradiated region.