| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage assembly provided with a stage, having a relatively small weight, relatively high resonance frequency, and relatively high survo-band width. SOLUTION: This stage holds an installation frame 14 and a work piece 24. This stage comprises a monolithic stage frame 16, which can move along the X-axis with respect to the installation frame 14 and can move along the Y-axis, which is nearly orthogonal to the X-axis, and can also move about the Z-axis, which is nearly orthogonal to both the X and Y axes.</p> |
