SEMICONDUCTOR DEVICE AND ARRANGEMENT METHOD OF DUMMY PATTERN

摘要

PROBLEM TO BE SOLVED: To improve the flatness of a semiconductor device. SOLUTION: The semiconductor device is provided with a semiconductor board 1, a first A/A dummy pattern 5a on the element separation area of the semiconductor board 1, and a second A/A dummy pattern 5b having a smaller pitch than the first A/A dummy pattern 5a. The arrangement of the first and second A/A dummy patterns 5a, 5b is performed in another step. The semiconductor device has the dummy patterns arranged in response to the occupation rate of an element pattern in a mesh area dividing the area on the semiconductor board into plurality in the other aspect.