PLASMA TREATMENT DEVICE AND PLASMA LIGHTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive plasma treatment device capable of turning on the plasma certainly and making the starting operation in good performance. SOLUTION: The plasma treatment device according to the present invention is structured so that under a pressure in the vicinity of the atmospheric pressure, a high-frequency discharge plasma is generated in a reaction vessel 2 whose one side is left open as a blowout hole 1, and the generated plasma is allowed to blow in jet form out of the blowout hole 1 in the reaction vessel 2, and is equipped with an igniting means 5 to turn on the plasma, whereby the plasma can be turned on in such a way that no high voltage is impressed to an impedance matching circuit.