| 摘要 |
PROBLEM TO BE SOLVED: To prevent the scattering of adhesive mist to the outside when the adhesive is applied to the surface of a disk substrate. SOLUTION: This device is provided with a rotation holding mechanism 1 for holding and rotating a disk substrate S, and a surrounding member 5 disposed in the outer periphery of the disk substrate S to receive the adhesive scattered around by the rotation of the disk substrate S. The surrounding member 5 is provided with an upper opening 6 for delivering the disk substrate S to the inside thereof, and a lower exhaust port 7 for exhausting the inside of the surrounding member 5. A shutter member 8 is provided above the upper opening 6 so as to be moved, an air flow flowing through the upper opening 6 to the inside of the surrounding member 5 following the exhaustion through the lower exhaust port 7 is controlled, and the scattering of the adhesive mist from the upper opening 6 is prevented by the air flow.
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