METHOD FOR MANUFACTURING THIN FILM MAGNETIC HEAD AND MAGNETIC DISK DEVICE

摘要

PROBLEM TO BE SOLVED: To manufacture a magnetic head having <=0.25μm track width and to obtain a magnetic disk device having >=20 Gbit/in2 surface recording density. SOLUTION: A phase shift mask in which a phase of a transmitted light through one electrode pattern is inverted to a phase of a transmitted light through the other electrode pattern is used as a reticle for forming the reproducing track width of the magnetic head of the magnetic disk device to form <=0.25μm track width. The resolution of the pattern can be enhanced and <=0.25μm resist pattern can be resolved and <=0.25μm track width can be formed by using the phase shift mask.