SEMICONDUCTOR MANUFACTURING APPARATUS WITH IP ADDRESS OF CONTROLLER AUTOMATICALLY ASSIGNED THERETO

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus where an IP address of a device controller is automatically assigned without the need for the device controller for a processing chamber to set again the IP address and the IP address uniquely decides a connected position of the processing chamber. SOLUTION: The semiconductor manufacturing apparatus of this invention is provided with a connection point at which the processing chamber is connected to a main body section, the connected position is provided with an IP address storage connector to which the IP address assigned to the device controller corresponding to the processing chamber is set in a form acquired externally, and the corresponding device controller has an IP address acquisition connector that acquires an IP address from the IP address storage connector in matching with the IP address storage connector at the connected position.